SPI Inspection machine 3D Inpex SP10

  1. linear motor structure, high speed,  no noise. with high precision grating ruler, to form a motion feedback system.
  2. Imported 12M pixel industrial camera, telecentric lens, to achieve high speed shooting inspection.
  3. Using GPU large scale parallel technology, to improve the measurement and inpection speed.
  4. Based on white Moire fringe PMP technology, to achieve high-precision detection as 0.37um hight resolution and 1um accuracy level.
  5. Supporting RS274-D, RS274-X format gerber files and GAD files, supporting DXF format